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US 11,221,506 B2Granted
Polarization switches including a phase change material
AssigneeGlobalFoundries U.S. Inc.
InventorsSteven M. Shank, Yusheng Bian, Ajey Poovannummoottil Jacob
Life of this patent
Estimating the term…
Abstract
Structures for a polarization switch and methods of fabricating a structure for a polarization switch. A waveguide core is located on a substrate. The waveguide core is composed of silicon nitride. An active layer is positioned proximate to a section of the waveguide core. The active layer composed of a phase change material having a first state with a first refractive index and a second state with a second refractive index.
Claims21
A structure comprising:
- a substrate;
- a waveguide core on the substrate, the waveguide core comprising silicon nitride;
- and
- an active layer positioned proximate to a section of the first waveguide core, the active layer comprised of a phase change material having a first state with a first refractive index and a second state with a second refractive index,
- wherein the active layer and the waveguide core have a non-contacting relationship.
2 more elements
A structure comprising:
- a substrate;
- a waveguide core on the substrate, the waveguide core comprising silicon nitride;
- and
- an active layer positioned proximate to a section of the waveguide core, the active layer comprised of a phase change material having a first state with a first refractive index and a second state with a second refractive index,
- wherein the phase change material is vanadium oxide.
2 more elements
A structure comprising:
- a substrate;
- a first waveguide core on the substrate, the first waveguide core comprising silicon nitride:
- a second waveguide core on the substrate;
- and
- an active layer positioned proximate to a section of the first waveguide core, the active layer comprised of a phase change material having a first state with a first refractive index and a second state with a second refractive index,
- wherein the second waveguide core includes a section positioned on the substrate proximate to the active layer, and the active layer is positioned on the substrate laterally between the section of the first waveguide core and the section of the second waveguide core.
3 more elements
Dependencies are inferred from the claim text.