Heat flux sensor with heating wire

Abstract

The invention relates to a heat flux sensor including: a heating wire (1) including a material capable of being taken to a determined temperature by Joule effect, suited to being connected to an electrical source, a resonator (2) of nano electro mechanical system (NEMS) type including: a beam (20) suspended with respect to a support (21), an actuating device (22) capable of generating a vibration of said beam under the effect of an excitation signal, a detection device configured to measure a displacement of said beam in the course of said vibration and to emit an output signal having a resonance at the resonance frequency of the resonator, said resonance frequency depending on the temperature of the beam, wherein one end (20a) of the beam (20) is integral with the heating wire (1) so as to enable a conduction of heat from the heating wire to the beam, a variation in temperature of the heating wire induced by a variation in a characteristic of a fluid surrounding said wire causing a variation in the resonance frequency of the resonator.

Dependencies are inferred from the claim text.