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US 11,217,963 B1Granted
Wafer level coatings for photonic die
AssigneeSkorpios Technologies, Inc.
InventorsMurtaza Askari, Stephen B. Krasulick
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Abstract
A photonic die includes an optical component that can emit output light. The optical component includes a substrate having a length and width that are substantially greater than a thickness thereof, the thickness defining a vertical direction. The optical component includes a vertical edge, and a reflective or antireflective coating on the vertical edge, wherein the reflective or antireflective coating includes a silicon-based material.
Claims12
1. A photonic die, comprising:
- an optical component that is capable of emitting output light, the optical component comprising a substrate having a length and a width that are substantially greater than a thickness thereof, wherein a direction of the thickness defines a vertical direction, the optical component including a vertical edge through which the output light is emitted;
- and
- a reflective or antireflective coating on the vertical edge, wherein the reflective or antireflective coating comprises a silicon-based material that includes SiOXNY having a refractive index n that is tuned within a range of n=1.85 to 1.90.
A photonic die, comprising:
- a silicon-based platform;
- a plurality of semiconductor lasers integrated with the silicon-based platform, wherein each semiconductor laser of the plurality includes a respective gain chip within a respective optical cavity, and each semiconductor laser of the plurality provides output light at a different wavelength than others of the plurality of semiconductor lasers;
- an echelle grating that combines the output lights of the plurality of semiconductor lasers into a single output waveguide that ends at a vertical output facet transverse to the output waveguide, wherein the output waveguide comprises silicon;
- a V-groove in the silicon-based platform adjacent to the vertical output facet;
- and an antireflective coating on the vertical output facet, wherein the antireflective coating is a single layer of SiOXNY having a refractive index n that is tuned within a range of n=1.85 to 1.90.
2 more elements
Dependencies are inferred from the claim text.