Back to results
US 11,217,426 B2Granted
Ion source and method
AssigneeVon Ardenne Asset GmbH & Co. KG
InventorTim Weichsel
Life of this patent
Estimating the term…
Abstract
An ion source can have: a multiplicity of electrodes, which are mounted electrically separated from one another and have: a first electrode, which has a depression; a second electrode, which is arranged in the depression; a third electrode, which partially covers the depression and through which a slit passes which exposes the second electrode; one or more than one magnet, which is designed to provide a magnetic field in the slit.
Claims15
An ion source, comprising:
- a multiplicity of electrodes, which are mounted electrically separately from one another and comprise:
- a first electrode, which has a depression;
- a second electrode, which is arranged in the depression;
- a third electrode, which partially covers the depression and through which a slit passes which exposes the second electrode;
- and
- one or more magnets, which are designed to provide a magnetic field in the slit.
3 more elements
A method for driving an ion source;
- wherein the ion source comprises:
- a multiplicity of electrodes, which are mounted electrically separately from one another and comprise:
- a first electrode, which has a depression;
- a second electrode, which is arranged in the depression;
- a third electrode, which partially covers the depression and through which a slit passes which exposes the second electrode;
- and
- one or more magnets, which are designed to provide a magnetic field in the slit;
- and
- wherein the method comprises:
- applying a first voltage to the second electrode and the third electrode;
- and
- applying a second voltage to the first electrode which differs from the first voltage.
9 more elements
A method for driving an ion source,
- wherein the ion source comprises:
- a multiplicity of electrodes, which are mounted electrically separately from one another and comprise:
- a first electrode, which has a depression;
- a second electrode, which is arranged in the depression;
- a third electrode, which partially covers the depression and through which a slit passes which exposes the second electrode;
- and
- one or more magnets, which are designed to provide a magnetic field in the slit;
- and
- wherein the method comprises:
- applying a first voltage to the third electrode;
- and
- applying a second voltage to the second electrode and the first electrode which differs from the first voltage.
9 more elements
Dependencies are inferred from the claim text.