Performance optimized scanning sequence for eBeam metrology and inspection

A system comprising:

• a characterization tool comprising:
• an illumination source configured to generate an illumination beam;
• one or more illumination optics to direct the illumination beam to a sample;
• and
• a detector to generate metrology data for the sample based on interaction of the illumination beam with the sample, wherein the characterization tool includes one or more adjustable measurement parameters to control the generation of metrology data;
• and
• a controller communicatively coupled to the characterization tool, the controller including one or more processors configured to execute program instructions causing the one or more processors to:
• receive design data associated with a plurality of regions of interest for measurement with the characterization tool;
• select individualized measurement parameters of the characterization tool for the plurality of regions of interest based on the design data to provide metrology data from the detector satisfying a selected quality metric, wherein the selected quality metric comprises at least one of signal strength, signal-to-noise ratio, contrast, or contrast-to-noise ratio;
• and
• direct the characterization tool to characterize the plurality of regions of interest based on the individualized measurement parameters.

A method comprising:

• receiving design data associated with a plurality of regions of interest for measurement with a characterization tool configured to generate metrology data for a sample based on interaction of an illumination beam with the sample, wherein the characterization tool includes one or more adjustable measurement parameters to control the generation of metrology data;
• selecting individualized measurement parameters of the characterization tool for the plurality of regions of interest based on the design data to provide metrology data from a detector satisfying a selected quality metric, wherein the selected quality metric comprises at least one of signal strength, signal-to-noise ratio, contrast, or contrast-to-noise ratio;
• and
• directing the characterization tool to characterize the plurality of regions of interest based on the individualized measurement parameters.