Imprint device and method for manufacturing article

An imprint device which brings a surface of a mold into contact with an imprint material on a substrate and transfers a shape of the surface of the mold onto the substrate, comprising:

• a mold holding part including a first chuck which holds the mold;
• a substrate holding part including a second chuck which holds the substrate;
• a contact member which can come into contact with the mold or the mold holding part when at least one of the mold holding part and the substrate is moved in a height direction, is installed at a position in a predetermined plane different from a position in the predetermined plane of the substrate held by the substrate holding part, and is installed at a height position corresponding to a height of a surface of the substrate held by the substrate holding part;
• and
• a measuring instrument which measures a contact force when the mold or the mold holding part comes into contact with the contact member.

An imprint device which brings a surface of a mold into contact with an imprint material on a substrate and transfers a shape of the surface of the mold onto the substrate, comprising:

• a mold holding part which holds the mold;
• a substrate holding part which holds the substrate;
• a contact part which can come into contact with the mold or the mold holding part when at least one of the mold holding part and the substrate is moved in a height direction, is installed at a position in a predetermined plane different from a position in the predetermined plane of the substrate held by the substrate holding part, and is installed at a height position corresponding to a height of a surface of the substrate held by the substrate holding part;
• and
• a measuring unit which measures a contact force when the mold or the mold holding part comes into contact with the contact part.