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US 11,207,697 B2Granted
Adjustable flow nozzle system
AssigneeShellback Semiconductor Technology, LLC
InventorsChristian K. Forgey, Alexander Trufanov, Joshua A. Levinson, Darren O. O'Reilly
Life of this patent
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Abstract
Various embodiments for an adjustable flow nozzle system having a manifold with a plurality of adjustable flow nozzles in which the flow rate of each adjustable flow nozzle may be individually adjusted are described herein.
Claims18
An adjustable flow nozzle system comprising:
- an adjustable flow manifold comprising:
- a manifold body defining an axial channel that extends between a distal end portion defining a distal opening and a proximal end portion defining a proximal opening;
- a plurality of access openings formed along a first side of the manifold body;
- and
- a plurality of apertures formed on an opposite second side of the manifold body;
- wherein the plurality of access openings and the plurality of apertures communicate with the axial channel;
- and
- a plurality of adjustable flow nozzles coupled to a respective one of the plurality of apertures, each of the plurality of adjustable flow nozzles comprising:
- a spray nozzle configured for providing a fluid pathway for a fluid exiting the adjustable flow nozzle;
- a stem retainer engaged to the spray nozzle, the stem retainer defining a first inlet opening and an axial opening in fluid flow communication with a first chamber;
- and
- a nozzle retainer engaged to the spray nozzle, wherein the nozzle retainer defines a second inlet opening in communication with a second chamber and wherein the stem retainer is configured to be rotatably disposed within the second chamber of the nozzle retainer such that the first inlet opening of the stem retainer is in an overlapping arrangement with the second inlet opening of the nozzle retainer such that a collective opening is formed between the first inlet opening of the stem retainer and the second inlet opening of the nozzle retainer as the stem retainer is rotated;
- and
- an adjuster in operative engagement with the stem retainer for causing rotation of the stem retainer relative to the nozzle retainer such that the cross-sectional area of collective opening is adjusted as the stem retainer is rotated, wherein the nozzle retainer is fixed in position relative to the rotatable stem retainer.
11 more elements
A method for adjusting the flow rate for an adjustable flow nozzle system comprising:
- providing an adjustable flow manifold comprising:
- a manifold body defining an axial channel that extends between a distal end portion defining a distal opening and a proximal end portion defining a proximal opening;
- a plurality of access openings formed along one side of the manifold body;
- a plurality of apertures formed on the opposite side of the manifold body, wherein the plurality of access openings and apertures communicate with the axial channel;
- and
- a plurality of adjustable flow nozzles coupled to a respective one of the plurality of apertures, each of the plurality of adjustable flow nozzles comprising:
- a spray nozzle configured for providing a fluid pathway for a fluid exiting the adjustable flow nozzle;
- a stem retainer engaged to the spray nozzle, the stem retainer defining a first inlet opening and an axial opening in fluid flow communication with a first chamber;
- a nozzle retainer engaged to the spray nozzle, wherein the nozzle retainer defines a second inlet opening in communication with a second chamber and wherein the stem retainer is configured to be rotatably disposed within the second chamber of the nozzle retainer such that the first inlet opening of the stem retainer is in an overlapping arrangement with the second inlet opening of the nozzle retainer such that a collective opening is formed between the first inlet opening of the stem retainer and the second inlet opening of the nozzle retainer as the stem retainer is rotated;
- and
- an adjuster in operative engagement with the stem retainer for causing rotation of the stem retainer relative to the nozzle retainer such that the cross-sectional area of collective opening is adjusted as the stem retainer is rotated;
- inserting a first key having an elongated key body defining a proximal portion and a distal portion through one of the plurality of apertures, the first key further comprising at least one key element extending from the proximal portion of the elongated key body;
- engaging the at least one key element of the first key with the nozzle retainer to maintain the nozzle retainer in a stationary position;
- engaging a second key with the adjuster;
- and
- rotating the second key such that the stem retainer is rotated relative to the stationary nozzle retainer for adjusting the cross-sectional area and flow rate through the collective opening.
13 more elements
An adjustable flow nozzle apparatus comprising:
- a spray nozzle configured for providing a fluid pathway for a fluid exiting the adjustable flow nozzle;
- a stem retainer engaged to the spray nozzle, the stem retainer defining a first inlet opening and an axial opening in fluid flow communication with a first chamber;
- a nozzle retainer engaged to the spray nozzle, wherein the nozzle retainer defines a second inlet opening in communication with a second chamber and wherein the stem retainer is configured to be rotatably disposed within the second chamber of the nozzle retainer such that the first inlet opening of the stem retainer is in an overlapping arrangement with the second inlet opening of the nozzle retainer such that a collective opening is formed between the first inlet opening of the stem retainer and the second inlet opening of the nozzle retainer as the stem retainer is rotated;
- and
- an adjuster in operative engagement with the stem retainer for causing rotation of the stem retainer relative to the nozzle retainer such that the cross-sectional area of the collective opening is adjusted as the stem retainer is rotated, wherein the adjustable flow nozzle apparatus is configured for engagement within a nozzle cavity of an adjustable flow manifold such that an axial channel of the manifold is in fluid flow communication with the collective opening of the adjustable flow nozzle.
2 more elements
Dependencies are inferred from the claim text.