Microphone device with ingress protection

A microphone device comprising:

• a microelectromechanical systems (MEMS) acoustic transducer, comprising:
• a substrate having an opening formed therein;
• a diaphragm including a conductive layer and an insulating layer, the insulating layer facing the opening, the diaphragm comprising at least one corrugation extending outwards from a plane of the diaphragm and at least one aperture structured to provide fluid communication between a front volume and a back volume of the MEMS acoustic transducer;
• a back plate separated from the diaphragm, the diaphragm positioned between the back plate and the substrate;
• and
• a peripheral support structure suspending the diaphragm over the substrate, the peripheral support structure attached to at least a portion of the periphery of the diaphragm and constraining the diaphragm at the periphery, the peripheral support structure having a tapered profile between the substrate and the diaphragm, the peripheral support structure located between the diaphragm and the substrate, at least a portion of the peripheral support structure being located radially inwards of a peripheral edge of the diaphragm.

A microelectromechanical system (MEMS) acoustic transducer comprising:

• a substrate having an opening formed therein;
• a diaphragm including a conductive layer and an insulating layer, the insulating layer facing the opening, the diaphragm comprising at least one corrugation extending outwards from a plane of the diaphragm and at least one aperture structured to provide fluid communication between a front volume and a back volume of the MEMS acoustic transducer;
• a peripheral support structure suspending the diaphragm over the substrate, the peripheral support structure attached to at least a portion of the periphery of the diaphragm and constraining the diaphragm at the periphery;
• and
• a back plate separated from the diaphragm and adjacent to a first side of the diaphragm, wherein the substrate is adjacent to a second side of the diaphragm opposite the first side of the diaphragm,
• wherein the peripheral support structure includes a sacrificial material, the sacrificial material includes at least one layer of glass having a single concentration of phosphorus, and at least one layer of glass that is devoid of phosphorous.

A microphone device comprising:

• a microelectromechanical systems (MEMS) acoustic transducer, comprising:
• a substrate having an opening formed therein;
• a diaphragm including a conductive layer and an insulating layer, the insulating layer facing the opening, the diaphragm comprising at least one corrugation extending outwards from a plane of the diaphragm and at least one aperture structured to provide fluid communication between a front volume and a back volume of the MEMS acoustic transducer;
• a back plate separated from the diaphragm, the diaphragm positioned between the back plate and the substrate;
• and
• a peripheral support structure suspending the diaphragm over the substrate, the peripheral support structure attached to at least a portion of the periphery of the diaphragm and constraining the diaphragm at the periphery, the peripheral support structure having a tapered profile between the substrate and the diaphragm, the peripheral support structure including a plurality of layers of glass, a first layer of the plurality of layers of glass having a first concentration of phosphorus, a second layer of the plurality of layers of glass having a second concentration of phosphorus, and at least one layer of the plurality of layers of glass is devoid of phosphorus.