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US 11,204,901 B2Granted
Method of matching records, method of scheduling maintenance and apparatus
AssigneeASML Netherlands B.V.
InventorsDavid Evert Song Kook Sigtermans, Nicolaas Hendrik Frank Ploos Van Amstel, Marcel Theodorus Petrus Falise
Life of this patent
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Abstract
A method of matching records from a plurality of data sources having variation between them in matching quality of their data, the method including repeatedly matching and filtering records from the data sources to obtain matched records using successively less strict matching rules, the matching rules being defined based on the variation in the matching quality.
Claims20
A method of matching records from a plurality of computer data sources having variation between them in matching quality of their data, the method comprising:
- matching computer data records from the data sources to obtain matched records using a set of matching rules, the set of matching rules being successively less strict and the set of matching rules selected or created based on the variation in the matching quality, wherein the matching comprises:
- (i) querying by a hardware computer processor system the data sources located in a memory by executing a strictest matching rule of the set of matching rules to perform an electronic data comparison in the hardware computer processor system to match a computer data record in the memory with another computer data record in the memory to obtain matched records;
- (ii) querying by the hardware computer processor system the data sources located in the memory by executing a less strict rule of the set of matching rules to perform an electronic data comparison in the hardware computer processor system for unmatched records in the memory to obtain matched records;
- and
- (iii) repeating item (ii);
- and
- outputting an electronic or optical signal for scheduling one or more maintenance actions to be performed in a part of the manufacturing system using the matched records.
4 more elements
A method of scheduling one or more maintenance actions in at least a part of a manufacturing system, the method comprising:
- matching computer data records from a plurality of computer data sources having variation between them in matching quality of their data by matching computer data records from the data sources to obtain matched records using a set of matching rules, the set of matching rules being successively less strict and the set of matching rules selected or created based on the variation in the matching quality, wherein the matching comprises:
- (i) querying by a hardware computer processor system the data sources located in a memory by executing a strictest matching rule of the set of matching rules to perform an electronic data comparison in the hardware computer processor system to match a computer data record in the memory with another computer data record in the memory to obtain matched records;
- (ii) querying by the hardware computer processor system the data sources located in the memory by executing a less strict rule of the set of matching rules to perform an electronic data comparison in the hardware computer processor system for unmatched records in the memory to obtain matched records;
- and
- (iii) repeating item (ii);
- and
- scheduling one or more maintenance actions to be performed in a part of the manufacturing system using the matched records.
4 more elements
An apparatus associated with a lithographic process, the apparatus comprising:
- a processing unit configured to at least:
- match computer data records from a plurality of computer data sources having variation between them in matching quality of their data by matching computer data records from the data sources to obtain matched records using a set of matching rules, the set of matching rules being successively less strict and the set of matching rules selected or created based on the variation in the matching quality, wherein the processing unit is configured to match computer data records by at least:
- (i) performance of a query, by the processing unit, of the data sources located in a memory by execution of a strictest matching rule of the set of matching rules to perform an electronic data comparison in the processing unit to match a computer data record in the memory with another computer data record in the memory to obtain matched records;
- (ii) performance of a query, by the processing unit, of the data sources located in the memory by executing of a less strict rule of the set of matching rules to perform an electronic data comparison in the processing unit for unmatched records in the memory to obtain matched records;
- and
- (iii) performance of a repetition of item (ii);
- and
- schedule one or more maintenance actions to be performed in the apparatus using the matched records.
5 more elements
Dependencies are inferred from the claim text.