Side opening unified pod
AssigneeBrooks Automation, Inc.
InventorsDaniel Babbs, William Fosnight, Robert C. May, William Weaver
Life of this patent
Estimating the term…
Loading patent…
AssigneeBrooks Automation, Inc.
InventorsDaniel Babbs, William Fosnight, Robert C. May, William Weaver
Estimating the term…
A substrate processing system including a processing section arranged to hold a processing atmosphere therein, a carrier having a shell forming an internal volume for holding at least one substrate for transport to the processing section, the shell being configured to allow the internal volume to be pumped down to a predetermined vacuum pressure that is different than an exterior atmosphere outside the substrate processing system, and a load port communicably connected to the processing section to isolate the processing atmosphere from the exterior atmosphere, the load port being configured to couple with the carrier to pump down the internal volume of the carrier and to communicably connect the carrier to the processing section, for loading the substrate into the processing section through the load port.
A substrate carrier configured for coupling to a load port of a substrate processing system that includes a processing section having a processing vacuum and where the load port includes a BOLTS interface, the substrate carrier comprising:
A substrate processing system comprising:
A method comprising:
Dependencies are inferred from the claim text.