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US 11,201,032 B2Granted
Electron emitter and method of fabricating same
AssigneeASML Netherlands B.V.
InventorsJuying Dou, Zheng Fan, Tzu-Yi Kuo, Zhongwei Chen
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Abstract
Electron emitters and method of fabricating the electron emitters are disclosed. According to certain embodiments, an electron emitter includes a tip with a planar region having a diameter in a range of approximately (0.05-10) micrometers. The electron emitter tip is configured to release field emission electrons. The electron emitter further includes a work-function-lowering material coated on the tip.
Claims20
An electron emitter comprising:
- an emitter tip comprising single crystal tungsten, the emitter tip having an apex with a diameter of less than 10 micrometers, wherein the apex comprises an emission area substantially aligned to a <100> plane of the single crystal tungsten;
- and
- a work-function-lowering material coated on the apex.
A thermal field emission cathode, comprising:
- an emitter comprising:
- an emitter tip comprising single crystal tungsten, the emitter tip having an apex with a diameter of less than 10 micrometers, wherein the apex comprises an emission area substantially aligned to a <100> plane of the single crystal tungsten;
- and
- a work-function-lowering material coated on the apex;
- and
- a heating component configured to provide thermal energy to the emitter.
3 more elements
An electron beam tool, comprising:
- an emitter comprising:
- an emitter tip configured to release field emission electrons, the emitter tip having an apex with a diameter of less than 10 micrometers, wherein the apex comprises an emission area substantially aligned to a <100> plane of the single crystal tungsten;
- and
- a work-function-lowering material coated on the apex;
- and
- a first deflector system configured to split the field emission electrons into an array of electron beams.
3 more elements
Dependencies are inferred from the claim text.