# US 11,193,762 B2 · Rotary table and roundness measuring apparatus

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- Number: US 11,193,762 B2
- Document ID: US11193762B2
- Status: Granted
- Kind: B2
- Application number: 16/380,335
- Filed: 2019-04-10
- Published: 2019-10-24
- Granted: 2021-12-07
- Earliest claimed: 2018-04-19
- Assignees: Mitutoyo Corporation
- Applicants: Mitutoyo Corporation
- Inventors: Hisayoshi Sakai; Junsuke Yasuno; Ryosuke Watanabe
- Web page: https://patentgrep.com/patent/US11193762B2

## CPC

- G01B 5/0004: {Supports (G01B5/025 takes precedence)}
- G01B 21/30: for measuring roughness or irregularity of surfaces
- B23Q 1/64: characterised by the purpose of the movement (indexing equipment B23Q16/02)
- G01B 5/201: {for measuring roundness}
- G01B 21/20: for measuring contours or curvatures, e.g. determining profile
- G12B 5/00: Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof (levels per se G01C9/00); Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
- G05B 2219/37194: Probe work, calculate shape independent of position, orientation, best fit
- G05B 2219/37197: From measured data derive form, roundness, orientation, parallel, straightness
- G01B: MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- B23Q: DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING (tools of the kind used in lathes or boring machines B23B27/00); MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
- G12B: CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G05B: CONTROL OR REGULATING SYSTEMS IN GENERAL; FUNCTIONAL ELEMENTS OF SUCH SYSTEMS; MONITORING OR TESTING ARRANGEMENTS FOR SUCH SYSTEMS OR ELEMENTS (systems for controlling or regulating non-electric variables G05D; systems for regulating electric or magnetic variables G05F; control devices or systems insofar as characterised by mechanical features only G05G)

## Abstract

A rotary disk rotatable around a vertical rotation axis; a bearing supporting the rotary disk so as to be freely rotatable; a slide disk slidable on a top surface of the rotary disk; a position adjustment bracket that displaces the slide disk along the top surface of the rotary disk; a placement disk that is supported by the slide disk; a plurality of air nozzles that are arranged on a top surface of the stator in an annular shape centered on the rotation axis, and form a static pressure air film between the top surface of the stator and a bottom surface of the rotary disk; an aerostatic pocket formed between the top surface of the rotary disk and a bottom surface of the slide disk; and a communication aperture is formed on the rotary disk and introduces pressure of the static pressure air film into the aerostatic pocket.

## Claims

### Claim 1

A rotary table comprising:
a rotary disk that is rotatable around a vertical rotation axis;
a stator assembly comprising a bearing that supports the rotary disk such that the rotary disk is freely rotatable;
a slide disk that is slidable on a top surface of the rotary disk;
a position adjustment bracket that displaces the slide disk along the top surface of the rotary disk;
a placement disk supported by the slide disk;
a plurality of air nozzles arranged on a top surface of the bearing in an annular configuration concentric with the rotation axis, and forming a static pressure air film between the top surface of the bearing and a bottom surface of the rotary disk;
an aerostatic pocket positioned between the top surface of the rotary disk and a bottom surface of the slide disk; and
a communication aperture formed in the rotary disk, the communication aperture configured to introduce pressure of the static pressure air film into the aerostatic pocket.

### Claim 2 (depends on 1)

The rotary table according to claim 1, wherein the communication aperture comprises a plurality of communication apertures arranged in an annular configuration having a diameter corresponding to a diameter of the annular configuration of the plurality of air nozzles.

### Claim 3 (depends on 2)

The rotary table according to claim 2, wherein the rotary table is provided with at least one of an annular groove formed on the top surface of the bearing in communication with the plurality of air nozzles, or an annular groove formed on the bottom surface of the slide disk and in communication with the plurality of communication apertures.

### Claim 4 (depends on 1)

The rotary table according to claim 1, wherein the aerostatic pocket is surrounded by a sliding seal affixed to one of the top surface of the rotary disk or the bottom surface of the slide disk.

### Claim 5 (depends on 2)

The rotary table according to claim 2, wherein the aerostatic pocket is surrounded by a sliding seal affixed to one of the top surface of the rotary disk or the bottom surface of the slide disk.

### Claim 6 (depends on 3)

The rotary table according to claim 3, wherein the aerostatic pocket is surrounded by a sliding seal affixed to one of the top surface of the rotary disk or the bottom surface of the slide disk.

### Claim 7

A roundness measuring apparatus comprising:
a rotary table comprising:
a rotary disk that is rotatable around a vertical rotation axis;
a stator assembly comprising a bearing that supports the rotary disk such that the rotary disk is freely rotatable;
a slide disk that is slidable on a top surface of the rotary disk;
a position adjustment bracket that displaces the slide disk along the top surface of the rotary disk;
a placement disk supported by the slide disk;
a plurality of air nozzles arranged on a top surface of the bearing in an annular configuration concentric with the rotation axis, and forming a static pressure air film between the top surface of the bearing and a bottom surface of the rotary disk;
an aerostatic pocket positioned between the top surface of the rotary disk and a bottom surface of the slide disk; and
a communication aperture formed in the rotary disk, the communication aperture configured to introduce pressure of the static pressure air film into the aerostatic pocket.

### Claim 8 (depends on 7)

The roundness measuring apparatus according to claim 7, wherein the communication aperture comprises a plurality of communication apertures arranged in an annular configuration having a diameter corresponding to a diameter of the annular configuration of the plurality of air nozzles.

### Claim 9 (depends on 8)

The roundness measuring apparatus according to claim 8, wherein the rotary table is provided with at least one of an annular groove formed on the top surface of the bearing in communication with the plurality of air nozzles, or an annular groove formed on the bottom surface of the slide disk and in communication with the plurality of communication apertures.

### Claim 10 (depends on 7)

The roundness measuring apparatus according to claim 7, wherein the aerostatic pocket is surrounded by a sliding seal affixed to one of the top surface of the rotary disk or the bottom surface of the slide disk.

### Claim 11 (depends on 8)

The roundness measuring apparatus according to claim 8, wherein the aerostatic pocket is surrounded by a sliding seal affixed to one of the top surface of the rotary disk or the bottom surface of the slide disk.

### Claim 12 (depends on 9)

The roundness measuring apparatus according to claim 9, wherein the aerostatic pocket is surrounded by a sliding seal affixed to one of the top surface of the rotary disk or the bottom surface of the slide disk.
