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US 11,193,036 B2Granted
Neutral layer composition
AssigneeLG Chem, Ltd.
InventorsEun Young Choi, No Jin Park, Je Gwon Lee, Yoon Hyung Hur, Sung Soo Yoon
Life of this patent
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Abstract
A neutral layer composition, which is capable of forming a neutral layer that can effectively control orientation characteristics of various block copolymers is provided.
Claims17
A neutral layer composition comprising:
- a random copolymer having a unit of Formula 1 below:
- wherein, R1 is hydrogen or an alkyl group having 1 to 4 carbon atoms,
- Q1 is a single bond, —O-L1-C(═O)— or —O-L1-,
- X1 is —N(R2)-L2-C(═O)—O—, —O—C(═O)—, —C(═O)—O—, a urethane linker or a urea linker, where L1 is an alkylene group having 1 to 4 carbon atoms, L2 is an alkylene group having 1 to 4 carbon atoms or an alkylidene group having 2 to 4 carbon atoms and R2 is hydrogen or an alkyl group having 1 to 4 carbon atoms, and
- Y1 is a linear hydrocarbon that is unsubstituted or having one or more carbon atoms substituted with oxygen.
2 more elements
A neutral layer comprising a random copolymer containing a unit of Formula 1 below:
- wherein, R1 is hydrogen or an alkyl group having 1 to 4 carbon atoms, Q1 is a single bond, —O-L1-C(═O)— or —O-L1- and X1 is —N(R2)-L2-C(═O)—O—, —O—C(═O)—, —C(═O)—O—, a urethane linker or a urea linker, where L1 is an alkylene group having 1 to 4 carbon atoms, L2 is an alkylene group having 1 to 4 carbon atoms or an alkylidene group having 2 to 4 carbon atoms and R2 is hydrogen or an alkyl group having 1 to 4 carbon atoms, and Y1 is linear hydrocarbon that is unsubstituted or having one or more carbon atoms substituted with oxygen.
Dependencies are inferred from the claim text.