Photocurrent scanning system
AssigneesTsinghua University, Hon Hai Precision Industry Co., Ltd.
InventorsKe Zhang, Yang Wei, Shou-Shan Fan
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Abstract
A photocurrent scanning system comprises a laser generating device, a focusing device, a displacement adjustment device, a bias supply device, and a measuring device. The laser generating device is used to emit a laser. The focusing device is used to focus the laser to a surface of a sample. The displacement adjustment device is used to place the sample and adjust a position of the sample, to make the laser focused onto different parts of the surface of the sample. The bias supply device is used to supply a voltage to the sample. The measuring device is used to measure a photocurrent signal flowing through the sample.
Claims20
A photocurrent scanning system comprising:
- a laser generating device configured to emit a laser;
- a focusing device configured to focus the laser to a surface of a sample, wherein the sample is located on a carrier, the carrier is a silicon substrate coated with a silicon dioxide layer, and a source and a drain are lead from the sample, and a gate is located on the silicon substrate;
- a displacement adjustment device, wherein the carrier is located on the displacement adjustment device, the displacement adjustment device is movable to make the laser focused onto different parts of the surface of the sample;
- a bias supply device configured to supply a voltage to the sample;
- and
- a measuring device configured to measure a photocurrent signal flowing through the sample.
Dependencies are inferred from the claim text.