Imprint apparatus, imprint method, and article manufacturing method
AssigneeCanon Kabushiki Kaisha
InventorsSetsuo Yoshida, Noriyasu Hasegawa
Life of this patent
Estimating the term…
Abstract
An imprint apparatus comprises a mold holder configured to move while holding the mold, and a substrate holder including a plurality of suction regions for chucking the substrate and configured to move while holding the substrate. When performing the mold separation, among the plurality of suction regions, a suction force of a suction region at a position where the mold is to be separated from the imprint material is made weaker than a suction force of a suction region on a peripheral side of the substrate than the position where the mold is to be separated, and the mold holder is tilted after at least one of the mold holder and the substrate holder is moved by a predetermined amount so as to widen a gap between the mold and the substrate.
Claims14
An apparatus that cures an uncured material in a state where the uncured material on a substrate and a mold have been brought into contact, and performs mold separation of separating the mold from the cured material, comprising:
- a mold holder configured to move while holding the mold;
- a substrate holder including a plurality of suction regions for chucking a lower surface of the substrate and configured to move while holding the substrate;
- and
- a controller configured to control the mold holder and the substrate holder during the mold separation,
- wherein in a state where, among the plurality of suction regions, a suction force of a second suction region, which is on a peripheral side of the substrate with respect to a first suction region for sucking a region of the lower surface of the substrate corresponding to a portion of the cured material on the substrate, is larger than a suction force of the first suction region,
- the controller is configured to:
- cause at least one of the mold holder and the substrate holder to be moved to widen a gap between the mold and the substrate,
- cause the mold holder and the substrate holder to be relatively tilted after the movement, and
- cause the at least one of the mold holder and the substrate to be moved to perform the mold separation in a state where the mold holder and the substrate holder are relatively tilted.
A method, comprising:
- bringing a mold held by a mold holder and an uncured material on a substrate held by a substrate holder into contact with each other;
- curing the uncured material after the contacting;
- and
- separating the mold from the cured material after the curing,
- wherein in the separating comprises
- causing, among a plurality of suction regions configured to chuck a lower surface of the substrate arranged on the substrate holder, a suction force of a second suction region, which is on a peripheral side of the substrate with respect to a first suction region for sucking a region of the lower surface of the substrate corresponding to a portion of the cured material on the substrate, larger than a suction force of the first suction region, and
- moving at least one of the mold holder and the substrate holder so as to widen a gap between the mold and the substrate,
- causing the mold holder and the substrate holder to be relatively tilted after the moving, and
- causing the at least one of the mold holder and the substrate to be moved to perform the separating in a state where the mold holder and the substrate holder are relatively tilted.
Dependencies are inferred from the claim text.