Spectral filter for high-power fiber illumination sources
AssigneeKLA Corporation
InventorsAndrew V. Hill, Ohad Bachar, Avi Abramov, Amnon Manassen
Life of this patent
Estimating the term…
Loading patent…
AssigneeKLA Corporation
InventorsAndrew V. Hill, Ohad Bachar, Avi Abramov, Amnon Manassen
Estimating the term…
A spectral filter includes a curved filtering element including a concave surface forming a portion of a sphere. The concave surface may be positioned to receive light diverging from an output face of an optical fiber located at a first location proximate to a center of the sphere corresponding to the concave surface. The concave surface may transmit a first portion of a spectrum of the light. The concave surface may further reflect and focus a second portion of the spectrum to a second location proximate to the center of the sphere. The spectral filter may further include a collector to direct the second portion of the spectrum away from the output face of the optical fiber.
A spectral filter comprising:
A filtered fiber illumination source comprising:
A method for filtering illumination from an optical fiber comprising:
Dependencies are inferred from the claim text.