Device and method for determining the concentration of a vapor
AssigneeAixtron SE
InventorMichael Long
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AssigneeAixtron SE
InventorMichael Long
Estimating the term…
A device for determining the partial pressure or concentration of a vapor in a volume includes a sensor element that can be caused to oscillate and temperature-controlled to a temperature below the condensation temperature of the vapor. The sensor element has an oscillation frequency that is influenced by a mass accumulation formed by condensed vapor on the sensor surface thereof. The rear side of the sensor element pointing away from the sensor surface contacts a thermal transfer surface of a thermal transfer element. The thermal transfer element is formed from an electrically heatable heating element that is connected to a cooling element in a thermally conductive manner by a thermal dissipation surface, which is different from the thermal transfer surface. The thermal transfer surface extends substantially parallel to the thermal dissipation surface.
A device for determining a partial pressure or concentration of a vapor in a volume (2), the device comprising:
A method for determining a partial pressure or concentration of a vapor in a volume (2), the method comprising:
Dependencies are inferred from the claim text.