Micro electrical mechanical system (MEMS) valve
AssigneeInternational Business Machines Corporation
InventorsYongchun Xin, Daniel Piper, Jonathan Fry, Jang Sim
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AssigneeInternational Business Machines Corporation
InventorsYongchun Xin, Daniel Piper, Jonathan Fry, Jang Sim
Estimating the term…
A micro electrical mechanical system (MEMS) valve is provided. The MEMS valve includes first and second bodies, a medium and a thermal element. The first body defines a first channel and a second channel intersecting the first channel. The second body defines a third channel and is movable within the first channel between first and second positions. When the second body is at the first positions, the second and third channels align and permit flow through the second and third channels. When the second body is at the second positions, the second and third channels misalign and inhibit flow through the second channel. The medium is charged into the first channel at opposite sides of the second body. The thermal element is proximate to the first channel and is operable to cause the medium to drive movements of the second body to the first or the second positions.
A micro electrical mechanical system (MEMS) valve, comprising:
Dependencies are inferred from the claim text.