Electrode structures for micro-valves for use in jetting assemblies

A micro-valve comprising:

• an orifice plate including an orifice;
• an actuating beam including a first end and a second end, wherein the actuating beam further comprises:
• a base layer;
• a layer of piezoelectric material disposed on the base layer and extending at least a portion of a distance between the first end and the second end, the layer of piezoelectric material defining a via therethrough to the base layer at an electrical connection portion thereof;
• a bottom electrode layer disposed on a first side of the layer of piezoelectric material at the electrical connection portion thereof;
• a top electrode layer disposed on a second side of the layer of piezoelectric material at the electrical connection portion thereof;
• and
• a bonding pad, at least a portion of the bonding pad disposed through the via on the base layer, the bonding pad comprising a bonding pad lead electrically connected to at least one of the bottom electrode layer or the top electrode layer,
• wherein the actuating beam includes a base portion extending from the electrical connection portion toward the first end and a cantilevered portion extending from the base portion toward the second end, wherein the cantilevered portion is movable in response to application of a differential electrical signal between the bottom electrode and the top electrode to one of open or close the micro-valve;
• and
• wherein the actuating beam comprises a passivation structure disposed on the layer of piezoelectric material, wherein the passivation structure conformally coats the beam with the exception of the bottom surface of the actuating beam.

A jetting assembly comprising:

• a valve body comprising an orifice plate including a plurality of orifices extending therethrough;
• a plurality of micro-valves, wherein each of the plurality of micro-valves comprises:
• an actuating beam including a first end and a second end, wherein the actuating beam further comprises:
• a base layer;
• a layer of piezoelectric material disposed on the base layer and extending at least a portion of a distance between the first end and the second end, the layer of piezoelectric material defining a via therethrough at an electrical connection portion thereof;
• a bottom electrode layer disposed on a first side of the layer of piezoelectric material at the electrical connection portion thereof, a portion of the bottom electrode layer disposed beneath the via;
• and
• a top electrode layer disposed on a second side of the layer of piezoelectric material at the electrical connection portion thereof, a portion of the top electrode layer disposed through the via,
• wherein the actuating beam includes a base portion extending from the electrical connection portion toward the first end and a cantilevered portion extending from the base portion toward the second end, wherein the cantilevered portion is movable in response to application of a differential electrical signal between the bottom electrode layer and the top electrode layer to one of open or close the micro-valve;
• wherein the actuating beam comprises a passivation structure disposed on the layer of piezoelectric material, wherein the passivation structure conformally coats the beam with the exception of the bottom surface of the actuating beam;
• and
• a fluid manifold coupled to each of the plurality of micro-valves to define a fluid reservoir for each of the plurality of micro-valves.