Method of enhancing a DLC coated surface for enhanced multipaction resistance
AssigneeNokomis, Inc.
InventorsRobert Michael Nichol, Walter John Keller, III, Todd Eric Chornenky
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Abstract
A method for creating an enhanced multipaction resistant diamond-like coating (DLC) coating with lower Secondary Electron Emission (SEE) properties is performed on an initial surface by etching a DLC coating deposited on the surface after deposition and optionally creating interlayers to enhance adhesion mechanical properties between the DLC coating and the initial surface.
Claims24
A method of creating an enhanced multipaction resistant (“Diamond Like Carbon”) DLC coating on a surface for use on a component in a multipactor flashover occurring environment, said method comprising:
- (a) preparing said surface;
- (b) coating said surface with a DLC coating layer;
- and
- (c) etching said DLC coating layer with an inert gas, whereby said surface resists multipaction in said multipactor flashover occurring environment, said etching comprises applying a first predetermined voltage for a first predetermined duration and a second predetermined voltage, being greater than said first predetermined voltage, for a second predetermined duration, said second predetermined duration being less than said first predetermined duration.
A method of creating a surface with a multipaction resistant diamond-like carbon (DLC) coating, said method comprising:
- (a) preparing an interlayer, said interlayer having a top surface and a bottom surface;
- (b) etching said top surface with an inert gas;
- (c) coating said top surface of said interlayer with a DLC coating layer;
- and
- (d) etching said DLC coating layer with an inert gas to create said multipaction resistant (DLC) coating that resists multipaction in a multipactor flashover occurring environment, said etching comprises applying a first predetermined voltage for a first predetermined duration and a second predetermined voltage, being greater than said first predetermined voltage, for a second predetermined duration, said second predetermined duration being less than said first predetermined duration.
A method of creating a surface with a multipaction resistant diamond-like carbon (DLC) coating, said method comprising:
- (a) preparing said surface;
- (b) etching said surface with an inert gas in a chamber;
- (c) coating said etched surface with one or more interlayers with adhesive properties, said one or more interlayers defining a top surface;
- (d) coating said top surface with a DLC coating layer in the chamber;
- (e) etching said DLC coating layer with an inert gas to create said surface with said multipaction resistant DLC coating that resists multipaction in a multipactor flashover occurring environment, said etching comprises applying a first predetermined voltage for a first predetermined duration and a second predetermined voltage, being greater than said first predetermined voltage, for a second predetermined duration, said second predetermined duration being less than said first predetermined duration;
- and
- (f) coating said etched DLC coating layer with a protectant layer.
A method of producing a surface with a multipaction resistant diamond-like carbon (DLC) coating, said method comprising:
- providing said surface with said DLC coating;
- and
- etching said DLC coating with an inert noble gas by applying a first voltage for a first duration and applying a second voltage for a second duration, said second voltage being greater than said first voltage, said second duration being less than said first duration.
Dependencies are inferred from the claim text.