Detection element, production method for detection element, and detection device
AssigneeDai Nippon Printing Co., Ltd.
InventorsTomohisa Motomura, Osamu Shimada, Ryoichi Ohigashi
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Abstract
A Detection element includes a substrate having a first surface and a second surface opposing the first surface, substrate comprising: a substrate provided with a through hole having inner diameters that differ from each other at two points along the thickness of substrate; a through electrode disposed in through hole; a first electrode connected to through electrode and disposed on the first surface; a patterned electrode connected to through electrode and disposed on the second surface; and a second electrode disposed on the first surface and spaced apart from the first electrode.
Claims20
A detection element comprising:
- a substrate that is an inorganic insulator made of a single material and has a first surface and a second surface opposite to the first surface, the substrate being arranged with a through hole having different inner diameters at two points along a thickness direction of the substrate;
- a through electrode arranged in the through hole;
- a first electrode connected to the through electrode, the first electrode being arranged on the first surface;
- a patterned electrode connected to the through electrode, the patterned electrode being arranged on the second surface;
- and
- a second electrode arranged on the first surface, the second electrode being separated from the first electrode.
A detection device comprising a detection element, the detection element comprising:
- a substrate having a first surface and a second surface opposite to the first surface, the substrate being arranged with a through hole having different inner diameters at two points along a thickness direction of the substrate;
- a through electrode arranged in the through hole;
- a first electrode connected to the through electrode, the first electrode being arranged on the first surface;
- a patterned electrode connected to the through electrode, the patterned electrode being arranged on the second surface;
- and
- a second electrode arranged on the first surface, the second electrode being separated from the first electrode;
- wherein the detection device has a resolution of 150 μm or less and a gas amplification factor of 12000 or more when 530 to 550V is applied between the first electrode and the second electrode.
A production method for detection element comprising:
- forming a through hole on a substrate that is an inorganic insulator made of a single material and has a first surface and a second surface opposite to the first surface, the through hole having different inner diameters at two points along a thickness direction of the substrate;
- forming a through electrode in the through hole;
- forming a first electrode connected to the through electrode and a second electrode separated from the first electrode on the first surface;
- and
- forming a patterned electrode connected to the through electrode on the second surface.
Dependencies are inferred from the claim text.