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US 11,181,510 B2Granted
Inspection apparatus and inspection method
AssigneeShimadzu Corporation
InventorsTakahide Hatahori, Kenji Takubo, Koki Yoshida
Life of this patent
Estimating the term…
Abstract
Provide an inspection apparatus and an inspection method capable of quickly inspecting a situation of joining between members in a joined body. The inspection apparatus is an inspection apparatus inspecting a situation of joining between a plurality of members in a joined body including the members joined to and overlapped one another.
Claims13
An inspection apparatus comprising:
- a vibrating unit that continuously applies a plurality of elastic waves to an observation surface of a joined body including a plurality of members joined to and overlapped with one another, under a plurality of vibration conditions in which one of frequencies, a spatial distribution of amplitudes and/or phases of the elastic waves are different from that of each other conditions,
- a detection unit that collectively detects displacement distribution of vibration caused by the elastic waves at joint portions between the members or in the vicinities of the joint portions on the observation surface where the elastic waves applied with the vibrating unit are in a steady state, and
- a processing unit that stores or displays the displacement distribution detected with the detection unit.
An inspection method for inspecting a situation of joining between a plurality of members in a joined body including the members joined to and overlapped one another, wherein the inspection method comprises:
- detecting displacement of vibration caused by a plurality of elastic waves at joint portions between the members or in the vicinities of the joint portions on an observation surface, together with applying the elastic waves to the observation surface of the joined body under a plurality vibration conditions in which one of frequencies, a spatial distribution of amplitudes and/or phases of the elastic waves are different from that of each other conditions, and
- determining whether the situation of joining is defective or undefective based on a result of the detecting step.
Dependencies are inferred from the claim text.