Sensing sensor
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorsHiroyuki Kukita, Tsuyoshi Shiobara
Life of this patent
Estimating the term…
Abstract
To provide a technique for expanding a measurement dynamic range and performing a stable detection in a sensing sensor using a crystal resonator. A spacer is disposed between an oscillator circuit that oscillates a crystal resonator and a base body that cools an oscillator circuit to a cryogenic temperature, and an oscillator circuit board includes a heater resistor that heats the oscillator circuit. Therefore, the temperature of the oscillator circuit that does not fall below a functional limit temperature and is a low temperature as much as possible can be provided. A negative resistance of the oscillator circuit can be increased, the measurement dynamic range can be expanded, and the crystal resonator can be stably oscillated.
Claims5
A sensing sensor that attaches a substance to be sensed to a piezoelectric resonator, detaches the substance to be sensed by changing a temperature of the piezoelectric resonator, and senses the substance to be sensed based on a relationship between a change of an oscillation frequency and the temperature of the piezoelectric resonator, the substance to be sensed being a gas, the sensing sensor comprising:
- a base body, cooled by a liquid nitrogen;
- the piezoelectric resonator, cooled by the base body;
- a heating unit that heats the piezoelectric resonator for changing the temperature of the piezoelectric resonator;
- a substrate mounted to the base body, the substrate including an oscillator circuit unit and a heater circuit thereon, the oscillator circuit unit oscillating the piezoelectric resonator, the heater circuit heating the oscillator circuit unit;
- and
- a heat insulating portion, disposed between the base body and the oscillator circuit unit for avoiding a heat transfer of a cool heat from the base body to the oscillator circuit unit via the substrate.
Dependencies are inferred from the claim text.