Scanning electron microscope and method for analyzing secondary electron spin polarization
AssigneeHitachi High-Tech Corporation
InventorsTeruo Kohashi, Hideo Morishita, Junichi Katane
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Abstract
A scanning electron microscope includes a spin detector configured to measure spin polarization of a secondary electron emitted from a sample, and an analysis device configured to analyze measurement data of the spin detector. The analysis device determines a width of a region where the secondary electron spin polarization locally changes in the measurement data. The analysis device further evaluates a strain in the sample based on the width of the region. With a configuration of the scanning electron microscope, it is possible to perform analysis of a strain in a magnetic material with high accuracy.
Claims15
A scanning electron microscope comprising:
- a spin detector configured to measure spin polarization of a secondary electron emitted from a sample;
- and
- an analysis device configured to analyze measurement data of the spin detector, wherein
- the analysis device is configured to
- determine a width of a region where the secondary electron spin polarization locally changes in the measurement data, and
- evaluate a strain in the sample based on the width of the region.
A method of analyzing secondary electron spin polarization of a sample measured with a scanning electron microscope by an analysis device, the method comprising:
- determining, by the analysis device, a width of a region where the secondary electron spin polarization locally changes in measurement data of the secondary electron spin polarization;
- and
- evaluating, by the analysis device, a strain in the sample based on the width of the region.
Dependencies are inferred from the claim text.