MEMS frame heating platform for electron imagable fluid reservoirs or larger conductive samples
AssigneeProtochips, Inc.
InventorsFranklin Stampley Walden, II, John Damiano, Jr., Daniel Stephen Gardiner, David P. Nackashi, William Bradford Carpenter
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Abstract
A heating device having a heating element patterned into a robust MEMs substrate, wherein the heating element is electrically isolated from a fluid reservoir or bulk conductive sample, but close enough in proximity to an imagable window/area having the fluid or sample thereon, such that the sample is heated through conduction. The heating device can be used in a microscope sample holder, e.g., for SEM, TEM, STEM, X-ray synchrotron, scanning probe microscopy, and optical microscopy.
Claims14
A sample support for heating microscopy samples, the sample support comprising:
- a thermally conductive MEMS frame with a top surface and a bottom surface;
- a first layer over the top surface comprising a first dielectric layer atop the thermally conductive MEMS frame;
- and
- a second layer over the top surface comprising a heat source element,
- wherein the heat source element is arranged such that thermal energy is conducted into the thermally conductive MEMS frame.
Dependencies are inferred from the claim text.