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US 11,165,413 B2Granted
Coupled resonator structure
AssigneeQorvo US, Inc.
InventorsNadim Khlat, Robert Aigner
Life of this patent
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Abstract
Various arrangements for electrically coupling the electrodes of coupled resonator structures (CRSes) to form unique two- and three-terminal devices as well as the use of such CRSes in filter networks are disclosed.
Claims9
A device comprising:
- a network input and a network output;
- a filter network coupled between the network input and the network output and comprising a plurality of coupled resonator structures (CRSes) that are electrically coupled together to form a ladder network, wherein each coupled resonator structure (CRS) comprises:
- a substrate;
- a bottom transducer comprising a first bottom electrode over the substrate, a first piezoelectric layer over the first bottom electrode, and a first top electrode over the first piezoelectric layer;
- a first acoustic coupling structure over the bottom transducer;
- and
- a top transducer over the first acoustic coupling structure and comprising a second bottom electrode, a second piezoelectric layer over the second bottom electrode, and a second top electrode over the second piezoelectric layer, wherein the bottom transducer is vertically acoustically coupled to the top transducer via the first acoustic coupling structure,
- wherein an arrangement of a first CRS of the plurality of CRSes comprises a second arrangement, and an arrangement of a second CRS of the plurality of CRSes is one of a first arrangement, a third arrangement, and a fourth arrangement, wherein:
- in the first arrangement, the second top electrode is a first terminal, the first bottom electrode is a second terminal, and the first top electrode is directly electrically coupled to the second bottom electrode to provide a third terminal of a first three terminal device;
- in the second arrangement, the second top electrode is a fourth terminal, the first top electrode is a fifth terminal, and the first bottom electrode is directly electrically coupled to the second bottom electrode to provide a sixth terminal of a second three terminal device;
- in the third arrangement, the first bottom electrode is directly electrically coupled to the second top electrode to provide a seventh terminal and the first top electrode is directly electrically coupled to the second bottom electrode to provide an eighth terminal of a first two terminal device;
- and
- in the fourth arrangement, the first bottom electrode is directly electrically coupled to the second bottom electrode to provide a ninth terminal and the first top electrode is directly electrically coupled to the second top electrode to provide a tenth terminal of a second two terminal device.
10 more elements
Dependencies are inferred from the claim text.