Ionization vacuum measuring cell
AssigneeInficon GmbH
InventorMartin Wüest
Life of this patent
Estimating the term…
Loading patent…
AssigneeInficon GmbH
InventorMartin Wüest
Estimating the term…
The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.
Ionization vacuum measuring cell (10), comprising:
Dependencies are inferred from the claim text.