Measuring device and operation method of system for inspecting focus ring

An operation method, comprising:

• providing a processing system which includes:
• a processing apparatus having a chamber body, a mounting table provided in a chamber provided by the chamber body, and the focus ring provided on the mounting table;
• and
• a transfer unit configured to transfer a target object onto the mounting table and into a region surrounded by the focus ring based on transfer position data, and
• providing a measuring device which includes:
• a disc-shaped base substrate;
• a plurality of sensor electrodes provided on the base substrate;
• a high frequency oscillator configured to apply a high frequency signal to the sensor electrodes;
• and
• an operation unit configured to calculate a plurality of measurement values indicating electrostatic capacitances of the sensor electrodes from a plurality of measurement values corresponding to potentials of the sensor electrodes,
• the method further comprising:
• transferring the measuring device by the transfer unit to a central position in the region specified by the transfer position data;
• calculating a representative value of the measurement values calculated by the measuring device transferred to the central position in the region;
• and
• deriving the amount of consumption of the focus ring with reference to a table in which the amount of consumption of the focus ring is associated with the representative value of the measurement values corresponding to the amount of consumption.