Methods of forming materials
AssigneeSeagate Technology LLC
InventorsTong Zhao, Michael C. Kautzky, Lance Nevala
Life of this patent
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Abstract
Methods of forming a near field transducer (NFT), the methods including the steps of depositing plasmonic material on a substrate; laser annealing at least a portion of the deposited plasmonic material at a wavelength from 100 nm to 2.0 micrometers (μm) to induce liquid phase epitaxy (LPE) in the annealed deposited plasmonic material to form a epitaxially modified plasmonic material; and forming a NFT from at least a portion of the epitaxially modified plasmonic material are disclosed as well as other methods and devices such as those formed.
Claims7
A method of forming a near field transducer (NFT), the method comprising the steps of:
- forming a mold on a substrate, the mold comprising tungsten (W), tantalum (Ta), titanium (Ti), platinum (Pt), palladium (Pd), ruthenium (Ru), iridium (Ir), carbon (C), oxides, nitrides, carbides, or borides, combinations thereof;
- depositing a plasmonic material on at least a portion of the mold;
- laser annealing at least a portion of the deposited plasmonic material to induce liquid phase epitaxy (LPE) in the annealed deposited plasmonic material to form a epitaxially modified plasmonic material, wherein the mold controls at least the in-plane gradient in the plasmonic material and the mold comprises trenches, pits, rods, pillars, or combinations thereof;
- and
- forming a NFT from at least a portion of the epitaxially modified plasmonic material.
Dependencies are inferred from the claim text.