Imprint lithography stamp method of making and using the same
AssigneeKoninklijke Philips N.V.
InventorMarcus Antonius Verschuuren
Life of this patent
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Abstract
Disclosed is a stamp (14) for an imprint lithography process, the stamp comprising an elastomer stamp body including a polysiloxane bulk portion (110) and a patterned surface comprising a feature pattern (16) for imprinting an imprinting composition (12) wherein the elastomer stamp body comprises a basic organic amine in an amount of at least 0.1% by weight based on the total weight of the elastomer stamp body. Also disclosed are methods of manufacturing such a stamp, and a method of forming a patterned layer on a substrate using such a stamp.
Claims19
A stamp for an imprint lithography process, the stamp having an elastomer stamp body comprising a fluid-permeable organic polymeric bulk portion and a patterned surface having a relief feature pattern for imprinting an imprinting composition in fluid communication with the fluid-permeable organic polymeric bulk portion;
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- an amount of at least one basic organic group capable of stimulating solidification of the imprinting composition when it is in contact with the patterned surface dispersed within the inner volume of the fluid-permeable organic polymeric bulk portion.
Dependencies are inferred from the claim text.