Particle detection system and method
AssigneeKanomax FMT, Inc.
InventorsDerek Oberreit, David Blackford, Patricia B. Keady, Siqin He
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AssigneeKanomax FMT, Inc.
InventorsDerek Oberreit, David Blackford, Patricia B. Keady, Siqin He
Estimating the term…
A particle detector for rapidly detecting and identifying sub 20 nm particles in Ultra Pure Water (UPW) is disclosed. The detector has a nano particle extractor, a nanoparticle collector, and a tracer particle introducer. The extractor limits the size of droplets output to a predetermined size. The extractor includes (1) a liquid sample inlet, (2) a nebulizer connected to the liquid sample inlet (the nebulizer has a gas supply, and an outlet), (3) an impactor arranged to receive material output from the nebulizer, (4) an evaporator connected to the nebulizer and impactor for providing an aerosol at the extractor outlet, and (5) an aerosol connected to the evaporator. The collector us connected to the extractor and has: (1) a collector inlet connected to the aerosol outlet of the extractor, (2) a vapor condensation growth tube connected to the collector inlet, and (3) a repositionable particle capture plate arranged to receive material output from the growth tube at spatially varying positions. The tracer particle introducer is connected to the liquid sample inlet of the extractor. It includes a tracer particle supply connected to a pump which is connected to the extractor. A method for rapid identification of sub−20 nm particles in UPW is also disclosed.
A particle detector apparatus for identifying particles in liquids comprising,
A particle detector for detecting and identifying sub 20 nm particles in liquids, comprising,
A particle detector for rapidly detecting and identifying sub 20 nm particles in liquids, specifically Ultra Pure Water, comprising,
Dependencies are inferred from the claim text.