Electron beam inspection tool and method of controlling heat load
AssigneeASML Netherlands B.V.
InventorsDennis Herman Caspar Van Banning, Jeroen Gerard Gosen, Maarten Lambertus Henricus Ter Heerdt, Edwin Cornelis Kadijk
Life of this patent
Estimating the term…
Abstract
An e-beam inspection tool is disclosed, the tool comprising, an electron optics system configured to generate an electron beam, an object table configured to hold a specimen, a positioning device configured to position the object table, the positioning device comprising an actuator, wherein the positioning device further comprises a heating device configured to generate a heat load and a heat load controller to control the generated heat load at least partly based on an actuator heat load generated in the actuator.
Claims20
An e-beam inspection tool comprising:
- an electron optics system configured to generate an electron beam;
- an object table configured to hold a specimen;
- and
- a positioning device configured to position the object table, the positioning device comprising an actuator,
- wherein the positioning device further comprises a heating device configured to generate a heat load and a heat load controller to control the heat load generated at least partly based on an actuator heat load generated in the actuator, and
- wherein the heating device is mounted to the object table.
A method of controlling heat load, the method comprising:
- determining an actuator heat load of a positioning device;
- generating a heat load using a heating device arranged in the positioning device, the heating device is mounted to an object table;
- and
- controlling the heat load generated at least partly based on the actuator heat load.
An apparatus comprising:
- an object table configured to hold a specimen;
- and
- a positioning device configured to position the object table, the positioning device comprising an actuator,
- a vacuum chamber, the positioning device, and the object table are arranged in the vacuum chamber,
- wherein the positioning device further comprises a heating device configured to generate a heat load and a heat load controller to control the heat load generated at least partly based on an actuator heat load generated in the actuator, and
- wherein the heating device is mounted to the object table.
Dependencies are inferred from the claim text.