Cathode structure for cold field electron emission and method of fabricating the same
AssigneeNational University of Singapore
InventorsAnjam Khursheed, Xiuyuan Shao
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Abstract
A cathode structure for cold field electron emission and method of fabricating a single-tip cathode structure for cold field electron emission. The cathode structure comprises a pointed cathode wire; and a graphene-based coating on at least a tip of the pointed cathode wire. In a preferred embodiment, graphene is coated on nickel tips by chemical vapour deposition wherein nickel functions as a catalyst for growth of graphene. The cathode structure provides stable cold field emission for electron microscopy and lithography applications and exhibits an ultralow work function value of about 1.1 eV.
Claims16
A cathode structure for cold field electron emission comprising:
- a single cathode emission site comprising a pointed cathode wire terminating in a single tip, the cathode wire comprising a metal in polycrystalline form;
- and
- a graphene-based coating on at least a tip of the pointed cathode wire.
A method of fabricating a cathode structure for cold field electron emission, the method comprising the steps of:
- providing a single cathode emission site comprising a pointed cathode wire terminating in a single tip, the cathode wire comprising a metal in polycrystalline form;
- and
- coating at least a tip of the pointed cathode wire with a graphene-based material.
Dependencies are inferred from the claim text.