Photoacoustic gas sensors and method of operating a photoacoustic gas sensor
AssigneeInfineon Technologies AG
InventorsMatthias Eberl, Franz Jost, Ilie Poenaru
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AssigneeInfineon Technologies AG
InventorsMatthias Eberl, Franz Jost, Ilie Poenaru
Estimating the term…
A photoacoustic gas sensor is provided. The photoacoustic gas sensor includes a hermetically sealed housing filled with a reference gas. Further, the photoacoustic gas sensor includes a microphone system arranged inside the housing. The microphone system is configured to generate a first microphone signal comprising a first signal component related to a photoacoustic excitation of the reference gas and a second microphone signal comprising a second signal component related to the photoacoustic excitation. The photoacoustic gas sensor additionally includes a circuit configured to generate an output signal based on the first microphone signal and the second microphone signal by destructively superimposing a third signal component of the first microphone signal related to mechanical vibrations of the photoacoustic gas sensor and a fourth signal component of the second microphone signal related to the mechanical vibrations.
A photoacoustic gas sensor, comprising:
A method of operating a photoacoustic gas sensor comprising a microphone system arranged inside a hermetically sealed housing, wherein the housing is filled with a reference gas, the method comprising:
A photoacoustic gas sensor, comprising:
Dependencies are inferred from the claim text.