Member transfer method and manufacturing method for liquid ejection head
AssigneeCanon Kabushiki Kaisha
InventorsTeruo Ozaki, Masaki Ohsumi, Tomohiko Nakano, Seiichiro Yaginuma, Keiji Matsumoto
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Abstract
A member transfer method includes sticking a member supported at a support to an object, thinning the support after the sticking of the member to the object, and removing the support from the member after the thinning of the support.
Claims9
A manufacturing method for a liquid ejection head including a channel formation member which has an ejection port ejecting a liquid and a channel communicating with the ejection port, a substrate on which the channel formation member is stacked and has a supply path communicating with the channel, and an energy generation element which generates energy for ejecting the liquid, the method comprising:
- sticking the channel formation member supported at a support to the substrate;
- thinning the support after the sticking of the channel formation member to the substrate;
- and
- peeling the support from the channel formation member after the thinning of the support and before exposing the channel formation member by light.
Dependencies are inferred from the claim text.