Fan scrubber and controlling method of fan scrubber
AssigneeToshiba Memory Corporation
InventorYuki Tsujiguchi
Life of this patent
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Abstract
According to one embodiment, a fan scrubber includes an inlet pipe to be connected to a post-stage side of a vacuum pump, in a state where a film preparation apparatus is arranged at a pre-stage before the vacuum pump, a process chamber connected to the inlet pipe, and containing a fan connected to a main shaft of a motor, a heater configured to heat the inlet pipe, and a controller configured to control turning on/off of the heater. The controller turns off the heater, when a signal received from the film preparation apparatus has been switched from a film preparation signal to a cleaning signal.
Claims20
A fan scrubber comprising:
- an inlet pipe to be connected to a post-stage side of a vacuum pump connected to a film preparation apparatus, the film preparation apparatus being arranged at a pre-stage side of the vacuum pump;
- a process chamber connected to the inlet pipe, and containing a fan connected to a main shaft of a motor;
- a heater configured to heat the inlet pipe;
- and
- a controller configured to receive a signal from a controller of the film preparation apparatus and control operation of the heater based on the signal,
- wherein the controller of the fan scrubber turns off the heater when the signal received from the controller of the film preparation apparatus has been switched from a film preparation signal to a cleaning signal.
Dependencies are inferred from the claim text.