Electrostatic speaker and a method for generating acoustic signals

A micro-electro-mechanical system (MEMS) electrostatic speaker that comprises an array of cells, wherein each cell comprises an upper stator, a membrane, a lower stator and supporting elements configured to support the upper stator, the membrane and the lower stator;

• wherein a distance between the upper stator and the lower stator of each cell is of microscopic scale;
• wherein a portion of an area of the upper stator is perforated;
• and wherein a ratio between (a) an aggregate size of holes and (b) an area of the upper stator ranges between 0.2-0.8.

A micro-electro-mechanical system (MEMS) electrostatic speaker that comprises an array of cells, wherein each cell comprises an upper stator, a membrane, a lower stator and supporting elements configured to support the upper stator, the membrane and the lower stator;

• wherein a distance between the upper stator and the lower stator of each cell is of microscopic scale;
• and wherein for each cell, at a plane of the membrane, at least some of the supporting elements of the cell are surrounded in part by at least one out of an air gap and a non-conductive material.

A micro-electro-mechanical system (MEMS) electrostatic speaker that comprises an array of cells, wherein each cell comprises an upper stator, a membrane, a lower stator and supporting elements configured to support the upper stator, the membrane and the lower stator;

• wherein a distance between the upper stator and the lower stator of each cell is of microscopic scale;
• and wherein for each cell the supporting elements comprises sidewalls that are connected to each other by pillars, wherein at the plane of the lower stator an aperture is formed below the pillar.

A micro-electro-mechanical system (MEMS) electrostatic speaker that comprises an array of cells, wherein each cell comprises an upper stator, a membrane, a lower stator and supporting elements configured to support the upper stator, the membrane and the lower stator;

• wherein a distance between the upper stator and the lower stator of each cell is of microscopic scale;
• and wherein for each cell the supporting elements comprises sidewalls that are connected to each other by pillars, wherein there is only a partial overlap between the lower stator and the pillar.

A micro-electro-mechanical system (MEMS) electrostatic speaker that comprises an array of cells, wherein each cell comprises an upper stator, a membrane, a lower stator and supporting elements configured to support the upper stator, the membrane and the lower stator;

• wherein a distance between the upper stator and the lower stator of each cell is of microscopic scale;
• and wherein for each cell the supporting elements comprises sidewalls that are connected to each other by pillars, wherein at the plane of the upper stator an aperture is formed above the pillar.

A micro-electro-mechanical system (MEMS) electrostatic speaker that comprises an array of cells, wherein each cell comprises an upper stator, a membrane, a lower stator and supporting elements configured to support the upper stator, the membrane and the lower stator;

• wherein a distance between the upper stator and the lower stator of each cell is of microscopic scale;
• and wherein for each cell the supporting elements comprise sidewalls that are connected to each other by pillars, wherein there is only a partial overlap between the upper stator and the pillar.

A micro-electro-mechanical system (MEMS) electrostatic speaker that comprises an array of cells, wherein each cell comprises an upper stator, a membrane, a lower stator and supporting elements configured to support the upper stator, the membrane and the lower stator;

• wherein a distance between the upper stator and the lower stator of each cell is of microscopic scale;
• wherein the MEMS electrostatic speaker further comprises an upper stator contact that is electrically coupled to upper stators of multiple cells of the array, a lower stator contact that is electrically coupled to lower stators of the multiple cells of the array, and a membrane contact that is electrically coupled to membranes of the multiple cells of the array.