Bulk acoustic wave (BAW) resonator
AssigneeQorvo US, Inc.
InventorsJyothi Swaroop Sadhu, Gernot Fattinger, Robert Aigner, Michael Schaefer
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Abstract
An acoustic resonator includes a first piezoelectric layer, a second piezoelectric layer, a coupler layer, a first electrode, and a second electrode. The first piezoelectric layer has a first polarity. The second piezoelectric layer has a second polarity opposite the first polarity. The coupler layer is between the first piezoelectric layer and the second piezoelectric layer. The first electrode is on the first piezoelectric layer opposite the coupler layer. The second electrode is on the second piezoelectric layer opposite the coupler layer.
Claims20
A second overmode bulk acoustic wave (BAW) resonator comprising:
- a first piezoelectric layer having a first polarity;
- a second piezoelectric layer having a second polarity, wherein the first polarity and the second polarity have opposing signs of a piezoelectric constant;
- a coupler layer between the first piezoelectric layer and the second piezoelectric layer;
- a first electrode on the first piezoelectric layer opposite the coupler layer;
- a second electrode on the second piezoelectric layer opposite the coupler layer;
- wherein the second overmode BAW resonator is configured to excite a second order mode through the first piezoelectric layer, the coupler layer, and the second piezoelectric layer.
Dependencies are inferred from the claim text.