Inspection device and inspection method
AssigneeToshiba Memory Corporation
InventorHiroshi Oota
Life of this patent
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Abstract
According to one embodiment, an inspection device includes a stage on which a substrate having a protrusion portion on a surface thereof is mountable. A ring member presses an outer periphery of the substrate on the stage. A liquid supply unit supplies a liquid on the surface of the substrate from the surface thereof to a first height. An imaging unit captures an image of a surface of the liquid and the protrusion portion from above the surface of the substrate. An arithmetic operation unit determines a size of an exposed portion of the protrusion portion which is exposed from the surface of the liquid by using the image obtained from the imaging unit, and determines a height of the protrusion portion on the basis of the size of the exposed portion.
Claims16
An inspection device comprising:
- a stage configured to mount a substrate;
- a ring member configured to secure an outer periphery of the substrate on the stage;
- a nozzle configured to supply a liquid on a surface of the substrate to reach a first height that causes a portion of the protrusion feature of the substrate to be exposed, wherein a height of the ring member is greater than the first height of the liquid;
- an imaging unit configured to capture an image including the liquid and the exposed portion of a protrusion feature of the substrate;
- and
- an arithmetic operator configured to determine a size of the exposed portion of the protrusion feature using the image, and determine a height of the protrusion feature based on the determined size of the exposed portion of the protrusion feature.
An inspection device comprising:
- a stage configured to mount a substrate;
- a ring member configured to secure an outer periphery of the substrate on the stage;
- a nozzle configured to supply a liquid on a surface of the substrate to reach a first height that causes a portion of the protrusion feature of the substrate to be exposed;
- an imaging unit configured to capture an image including the liquid and the exposed portion of a protrusion feature of the substrate;
- and
- an arithmetic operator configured to determine a size of the exposed portion of the protrusion feature using the image, and determine a height of the protrusion feature based on the determined size of the exposed portion of the protrusion feature,
- wherein a liquid repellant property of the protrusion feature is different from a liquid repellant property of the liquid.
An inspection device comprising:
- a stage configured to mount a substrate;
- a diaphragm, disposed above the substrate, that is configured to press a film, disposed on a surface of the substrate, to a first height to expose a portion of a protrusion feature of the substrate;
- an imaging unit configured to capture an image including the film and the exposed portion of the protrusion feature;
- and
- an arithmetic operator configured to determine a size of the exposed portion of the protrusion feature using the image obtained from the imaging unit, and determine a height of the protrusion feature based on the determined size of the exposed portion.
Dependencies are inferred from the claim text.