Resist composition and method of forming resist pattern

A resist composition comprising:

• a base component (A) which exhibits changed solubility in a developing solution under action of acid, and
• an acid-generator component (B) which generates acid upon exposure,
• the acid-generator component (B) comprising at least one acid generator (B1) represented by general formula (b1-1), (b1-2) or (b1-3) shown below, at least one acid generator (B2) represented by formula (B2)-1 or (B2)-2 shown below, and at least one acid generator (B3) represented by general formula (b3) shown below:
• wherein R″101 represents an aliphatic cyclic group which may have a substituent, a group represented by any one of formulae (r-hr-1) to (r-hr-6) shown below or a chain-like alkyl group which may have a substituent;
• R″102 represents an aliphatic cyclic group which may have a substituent, a lactone-containing cyclic group represented by any one of general formulae (a2-r-1) to (a2-r-7) shown below or an —SO2— containing cyclic group represented by any one of general formulae (a5-r-1) to (a5-r-4) shown below;
• R″103 represents an aromatic cyclic group which may have a substituent, an aliphatic cyclic group which may have a substituent or a chain-like alkenyl group which may have a substituent;
• V″101 represents a fluorinated alkylene group;
• L″101 represents —C(═O)— or —SO2—;
• v″ represents an integer of 0 to 3;
• q″ represents an integer of 1 to 20;
• n″ represents 0 or 1;
• and each M1+ independently represents a monovalent organic cation:
• wherein each Ra′21 independently represents a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxy group, —COOR″, —OC(═O)R″, a hydroxyalkyl group or a cyano group;
• R″ represents a hydrogen atom or an alkyl group;
• A″ represents an oxygen atom, a sulfur atom or an alkylene group of 1 to 5 carbon atoms which may contain an oxygen atom or a sulfur atom;
• n′ represents an integer of 0 to 2;
• and m′ represents 0 or 1;
• wherein each Ra′51 independently represents a hydrogen atom, an alkyl group, an alkoxy group, a halogen atom, a halogenated alkyl group, a hydroxy group, —COOR″, —OC(═O)R″, a hydroxyalkyl group or a cyano group;
• R″ represents a hydrogen atom or an alkyl group;
• A″ represents an oxygen atom, a sulfur atom or an alkylene group of 1 to 5 carbon atoms which may contain an oxygen atom or a sulfur atom;
• and n′ represents an integer of 0 to 2
• R2—COO−M2+ (b3)
• wherein R3 represents a cyclic group which may have a substituent, a chain alkyl group which may have a substituent, or a chain alkenyl group which may have a substituent;
• and M3+ independently represents a monovalent organic cation.