Multi-degree-of-freedom error measurement system for rotary axes and method thereof

A multi-degree-of-freedom error measurement system, comprising:

• a light source, producing an x-axis ray;
• an axicon, disposed on an axis average line, said x-axis ray incident to said axicon along an x-axis and producing one or more refractions to produce an x-axis emitted ray while the rotation by said axicon is driven by said axis average line;
• a pair of x-axis two-dimensional optoelectrical sensors, located in the emitting direction of said x-axis emitted ray for sensing said x-axis emitted ray;
• and
• an operational unit, disposed in a host to connect electrically to said x-axis two-dimensional optoelectrical sensors to read sensing results of said two-dimensional optoelectrical sensors while said host connected to said plurality of two-dimensional optoelectrical sensors, operating an x-axis radial error and a x-axis tilt error according to the vector variations of said x-axis ray and said x-axis emitted ray on said pair of x-axis two-dimensional optoelectrical sensors.

A multi-degree-of-freedom error measurement system, comprising:

• a light source, producing a y-axis ray;
• an axicon, disposed on an axis average line, said y-axis ray incident to said axicon along a y-axis and producing one or more refractions to produce a y-axis emitted ray while the rotation by said axicon is driven by said axis average line;
• a pair of y-axis two-dimensional optoelectrical sensors, located in the emitting direction of said y-axis emitted ray for sensing said y-axis emitted ray;
• and
• an operational unit, disposed in a host to connect electrically to said y-axis two-dimensional optoelectrical sensors to read sensing results of said two-dimensional optoelectrical sensors while said host connected to said plurality of two-dimensional optoelectrical sensors, operating a y-axis radial error and y-axis tilt error according to the vector variations of said y-axis ray and said y-axis emitted ray on said pair of y-axis two-dimensional optoelectrical sensors.

A multi-degree-of-freedom error measurement system, comprising:

• a plurality of light sources, producing an x-axis ray and a y-axis ray having different initial vectors;
• an axicon, location on an axis average line and located at an intersection point of said x-axis ray and said y-axis ray, said x-axis ray and said y-axis ray incident to said axicon to produce a plurality of incident rays corresponding to a plurality of refractive vectors and one or more reflective vectors and to produce an x-axis emitted ray and a y-axis emitted ray for emitting while the rotation by said axicon is driven by said axis average line, and an angle formed between said x-axis emitted ray and said y-axis emitted ray;
• a plurality of two-dimensional optoelectrical sensors, receiving said x-axis emitted ray and said y-axis emitted ray emerged from said axicon;
• and
• an operation unit, disposed in a host to connect electrically to said plurality of two-dimensional sensors to read sensing results of said two-dimensional optoelectrical sensors while said host connected to said plurality of two-dimensional optoelectrical sensors, operating the vector variations of said x-axis ray and said y-axis ray and the vector variations of said x-axis emitted ray and said y-axis emitted ray on said plurality of two-dimensional optoelectrical sensors to give a x-axis radial error, a x-axis tilt error, a y-axis radial error, and y-axis tilt error.

A multi-degree-of-freedom error measurement method, comprising steps of:

• producing a first ray, a second ray, and a third ray having different initial vectors;
• driving said first ray, said second ray, and said third ray to output to a multi-facet reflector and an axicon on an axis average line, said multi-facet reflector producing a reflective ray according to said first ray, said second ray and said third ray forming a plurality of incident rays corresponding to a plurality of refractive vectors inside said axicon and one or more reflective vectors to form a first emitted ray and a second emitted ray while the rotation by said axicon is driven by said axis average line;
• using a plurality of two-dimensional optoelectrical sensors to receive said reflective ray, said first emitted ray, and said second emitted ray, the rotation of said axis average line driving said reflective ray, said first emitted ray, and said second emitted ray to form vector variations on said plurality of two-dimensional optoelectrical sensors;
• and
• using an operational unit executing statistics and operation according to the initial vectors, said plurality of refractive vectors, and said one or more reflective vectors of said first ray, said second ray, and said third ray to obtain an x-axis radial error, a y-axis radial error, an axial error, a x-axis tilt error, y-axis tilt error, and an angular alignment error for rotation according to the vector variations of said first emitted ray and said second emitted ray.