Bulk acoustic wave filter
AssigneeRFHIC Corporation
InventorWon Sang Lee
Life of this patent
Estimating the term…
Abstract
A bulk acoustic wave (BAW) filter for passing through electric signals in a preset frequency range is provided. The BAW filter includes: a diamond substrate; a passivation layer formed on the diamond substrate; a first metal layer formed on the passivation layer; a piezoelectric layer formed on the first metal layer; a second metal layer formed on a piezoelectric layer and a metal pad formed on the first metal layer. The metal pad, first metal layer, piezoelectric layer and second metal layer form an electrical path that allows an electrical signal within a preset frequency range to pass therethrough.
Claims20
A method for fabricating a bulk acoustic wave filter, comprising:
- forming a piezoelectric layer;
- forming a first metal layer on a first surface the piezoelectric layer;
- forming a first passivation layer on the first metal layer;
- forming a seed layer of the first passivation layer, the seed layer being formed of diamond powder;
- forming a diamond substrate on the seed layer;
- forming a second metal layer on a second surface of the piezoelectric layer;
- removing a portion of the piezoelectric layer to expose a portion of the first metal layer;
- and
- forming a metal pad on the expose portion of the first metal layer.
A non-transitory computer-readable medium or media comprising one or more sequences of instructions which, when executed by one or more processors, causes steps for fabricating a bulk acoustic wave filter comprising:
- forming a piezoelectric layer;
- forming a first metal layer on a first surface the piezoelectric layer;
- forming a first passivation layer on the first metal layer;
- forming a seed layer of the first passivation layer, the seed layer being formed of diamond powder;
- forming a diamond substrate on the seed layer;
- forming a second metal layer on a second surface of the piezoelectric layer;
- removing a portion of the piezoelectric layer to expose a portion of the first metal layer;
- and
- forming a metal pad on the expose portion of the first metal layer.
Dependencies are inferred from the claim text.