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US 11,146,240 B2Granted
Micromechanical resonator and resonator system including the same
AssigneeSamsung Electronics Co., Ltd.
InventorsYongseop Yoon, Sungchan Kang, Cheheung Kim, Choongho Rhee
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Abstract
A micromechanical resonator includes a support beam having a fixed end, and a free end configured to vibrate. The micromechanical resonator includes a lumped mass disposed on the free end. A height of the lumped mass is greater than a width of the lumped mass.
Claims20
A micromechanical resonator comprising:
- a support beam having a fixed end, and a free end configured to vibrate;
- and
- a lumped mass disposed on the free end,
- wherein a height of the lumped mass in the first direction is greater than a width of the lumped mass in a second direction, and
- wherein the second direction is perpendicular to a longitudinal direction of the support beam.
2 more elements
A resonator system comprising:
- a support member;
- and
- a plurality of micromechanical resonators each having an end fixed to the support member, the plurality of micromechanical resonators having different resonance frequencies,
- wherein at least one of the plurality of micromechanical resonator includes:
- a support beam having a fixed end, and a free end configured to vibrate;
- and
- a lumped mass disposed on the free end,
- wherein a height of the lumped mass is greater than a width of the lumped mass in a second direction, and
- wherein the second direction is perpendicular to a longitudinal direction of the support beam.
6 more elements
Dependencies are inferred from the claim text.