Small piezoelectric resonator
AssigneeMicro Crystal AG
InventorsSilvio Dalla Piazza, Felix Staub
Life of this patent
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Abstract
The invention relates to a piezoelectric resonator, which comprises a base and at least two vibrating arms (3) extending from the base, at least two grooves (4a, 4b) being formed opposite each other on part of the length of the arms and on upper and lower faces of the arms. The depth of the groove on the upper face is less than 30% of the total thickness of each arm and the depth of the groove on the lower face is more than 50% of the total thickness of each arm, or reversely.
Claims18
A piezoelectric resonator comprising a base and at least two vibrating arms connected to the base in a direction of a crystalline axis X, wherein the vibrating arms extend from the base in a direction of a crystalline axis +Y or −Y, wherein at least a first groove is formed on an upper face on a side +Z of each arm along the crystalline axis +Y or −Y on part of the length of the arms and wherein at least a second groove is formed on a lower face on a side −Z of each arm along the crystalline axis +Y or −Y on part of the length of the arms and opposite the first groove in an asymmetrical arrangement,
- wherein the depth of the first groove is less than 30% of the total thickness of each arm or more than 50% of the total thickness of each arm, and
- wherein the depth of the second groove is more than 50% of the total thickness of each arm if the depth of the first groove is less than 30% of the total thickness of each arm, or less than 30% of the total thickness of each arm if the depth of the first groove is more than 50% of the total thickness of each arm.
Dependencies are inferred from the claim text.