Film bulk acoustic resonator having suppressed lateral mode
AssigneeSkyworks Global Pte. Ltd.
InventorsJae Myoung Jhung, Jae Hyung Lee, Kwang Jae Shin, Myung Hyun Park
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AssigneeSkyworks Global Pte. Ltd.
InventorsJae Myoung Jhung, Jae Hyung Lee, Kwang Jae Shin, Myung Hyun Park
Estimating the term…
Film bulk acoustic resonator having suppressed lateral mode. In some embodiments, a film bulk acoustic resonator can include a piezoelectric layer having a first side and a second side, a first electrode having a first lateral shape implemented on the first side of the piezoelectric layer, and a second electrode having a second lateral shape implemented on the second side of the piezoelectric layer. The first and second lateral shapes can be selected and arranged to provide a resonator shape defined by an outline of an overlap of the first and second electrodes. The resonator shape can include N curved sections joined by N vertices of an N-sided polygon. The resonator shape can be configured to have no axis of symmetry.
A bulk acoustic resonator comprising:
A film bulk acoustic resonator device comprising:
A packaged module comprising:
Dependencies are inferred from the claim text.