Broadband power combining arrangement

A generator, comprising:

• a plurality of amplifiers;
• and
• a power combiner, the power combiner comprising:
• a plurality of inputs, each input connectable to a respective power amplifier of the plurality of amplifiers for receiving a respective power signal therefrom;
• a plurality of impedance matching circuit branches connected to a respective one of the plurality of inputs;
• each impedance matching circuit branch including at least one high pass filter section and at least one low pass filter section through which the respective power signal passes;
• the impedance matching circuit branches connected at an output so as to combine the power signals from each power amplifier;
• the output for outputting the combined power signal;
• and
• a balancing circuit connecting each of the impedance matching circuit branches and isolating the inputs from each other,
• wherein the balancing circuit comprises:
• a plurality of balancing circuit branches connected to each of the impedance matching circuit branches at tapping points, wherein the tapping points are each located between the at least one high pass filter section and the at least one low pass filter section of the respective impedance matching circuit branch.

A generator in combination with a plasma tool including a plasma chamber, wherein the generator comprises:

• a plurality of amplifiers;
• and
• a power combiner, the power combiner comprising:
• a plurality of inputs, each input connectable to a respective power amplifier of the plurality of amplifiers for receiving a respective power signal therefrom;
• a plurality of impedance matching circuit branches connected to a respective one of the plurality of inputs;
• each impedance matching circuit branch including at least one high pass filter section and at least one low pass filter section through which the respective power signal passes;
• the impedance matching circuit branches connected so as to combine the power signals from each power amplifier;
• and
• an output for outputting the combined power signal.

A printed circuit board comprising:

• a dielectric substrate;
• a plurality of input terminals arranged on the dielectric substrate;
• a plurality of impedance matching circuit branches arranged on the dielectric substrate, wherein each of the impedance matching circuit branches comprises at least one high pass filter section and at least one low pass filter section, each configured to filter an input power signal received by one of the input terminals;
• an output terminal arranged on the dielectric substrate, wherein the output terminal is configured to output the combined filtered power signal;
• and
• a balancing circuit connecting each of the impedance matching circuit branches and isolating the input terminals from each other, wherein
• the balancing circuit comprises a plurality of balancing circuit branches connected to each of the impedance matching circuit branches at tapping points, and wherein
• the tapping points are each located between the at least one high pass filter section and the at least one low pass filter section of the respective impedance matching circuit branch.