Resistive random access memory device

A method of manufacturing a resistive random access memory device, the method comprising:

• forming a first electrode;
• forming, on the first electrode, a solid electrolyte made of metal oxide extending at least partially onto the first electrode;
• forming, on the solid electrolyte made of metal oxide, an interface layer;
• forming, on the interface layer, a soluble second electrode, the soluble second electrode being configured to supply mobile ions circulating in the solid electrolyte made of metal oxide to the first electrode to form a conductive filament between the first electrode and the soluble second electrode when a voltage is applied between the first electrode and the soluble second electrode,
• wherein said forming, on the solid electrolyte made of metal oxide, of the interface layer comprises the following sub-steps:
• (i) a first sub-step of depositing, on the solid electrolyte made of metal oxide, a layer comprising a chalcogen element and a soluble conductive element;
• (ii) after the first sub-step, a second sub-step of depositing, on the layer comprising the chalcogen element and the soluble conductive element, a layer comprising a transition metal from groups 3, 4, 5 or 6 of the periodic table;
• and
• (iii) after the second sub-step, a third sub-step of thermal annealing for at least partially diffusing the transition metal into the layer comprising the chalcogen element and the soluble conductive element, and for obtaining the interface layer;
• and
• wherein said forming, on the interface layer, of the soluble second electrode comprises depositing, on the interface layer, an ion source layer comprising the soluble conductive element, said depositing, on the interface layer, of the ion source layer being carried out after said third sub-step of thermal annealing.