Monolithic silicon photomultiplier array
AssigneeWaymo LLC
InventorsCaner Onal, Pierre-Yves Droz, Nirav Dharia
Life of this patent
Estimating the term…
Abstract
An optical system may include a substrate and a plurality of silicon photomultipliers (SiPMs) monolithically integrated with the substrate. Each SiPM may include a plurality of single photon avalanche diodes (SPADs). The optical system also includes an aperture array having a plurality of apertures. The plurality of SiPMs and the aperture array are aligned so as to define a plurality of receiver channels. Each receiver channel includes a respective SiPM of the plurality of SiPMs optically coupled to a respective aperture of the plurality of apertures.
Claims18
An optical system comprising:
- a substrate;
- a plurality of silicon photomultipliers (SiPMs) monolithically integrated with the substrate, wherein each SiPM comprises a plurality of single photon avalanche diodes (SPADs);
- an aperture array comprising a plurality of apertures, wherein the plurality of SiPMs and the aperture array are aligned so as to define a plurality of receiver channels, wherein each receiver channel comprises a respective SiPM of the plurality of SiPMs optically coupled to a respective aperture of the plurality of apertures;
- and
- a baffle structure, wherein the baffle structure comprises a plurality of openings in an optically opaque material, wherein the baffle structure is arranged between the aperture array and the plurality of SiPMs such that each receiver channel comprises a respective SiPM of the plurality of SiPMs optically coupled to a respective aperture of the plurality of apertures via a respective opening in the baffle structure.
A method of manufacturing an optical system, the method comprising:
- providing a monolithic SiPM array comprising a plurality of silicon photomultipliers (SiPMs) monolithically integrated with a substrate, wherein each SiPM comprises a plurality of single photon avalanche diodes (SPADs);
- aligning an aperture array comprising a plurality of apertures with the monolithic SiPM array so as to define a plurality of receiver channels, wherein each receiver channel comprises a respective SiPM of the plurality of SiPMs optically coupled to a respective aperture of the plurality of apertures;
- and
- positioning a baffle structure comprising a plurality of openings in an optically opaque material between the monolithic SiPM array and the aperture array such that each receiver channel comprises a respective SiPM of the plurality of SiPMs optically coupled to a respective aperture of the plurality of apertures via a respective opening in the baffle structure.
Dependencies are inferred from the claim text.