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US 11,145,771 B2Granted
Method for depositing a conductive coating on a surface
AssigneeOTI Lumionics Inc.
InventorsMichael Helander, Jacky Qiu, Zhibin Wang, Zheng-Hong Lu
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Abstract
A method for depositing a conductive coating on a surface is provided, the method including treating the surface by depositing fullerene on the surface to produce a treated surface and depositing the conductive coating on the treated surface. The conductive coating generally includes magnesium. A product and an organic optoelectronic device produced according to the method are also provided.
Claims11
A system for depositing a conductive coating on a surface of a substrate, the system comprising:
- an evaporation source for evaporating a source material, the source material including magnesium;
- a shadow mask defining an aperture, the shadow mask being arranged between the evaporation source and the substrate;
- wherein the evaporation source is configured to direct the evaporated source material towards the surface of the substrate,
- wherein an organic coating covers at least a portion of the shadow mask for inhibiting deposition of the source material on the shadow mask, while allowing passage of at least some of the evaporated source material through the aperture.
1 more element
A method for depositing a conductive coating on a surface of a substrate, the method comprising:
- a) providing an evaporation source for evaporating a source material including magnesium towards the surface of the substrate;
- b) providing a shadow mask defining an aperture between the evaporation source and the substrate;
- and
- c) providing an organic coating covering at least a portion of the surface of the shadow mask for inhibiting deposition of the source material on the shadow mask, while allowing passage of at least some of the evaporated source material through the aperture.
1 more element
Dependencies are inferred from the claim text.