Electronic device and method of manufacturing the same
AssigneeSamsung Electronics Co., Ltd.
InventorsTaehwan Moon, Eunha Lee, Junghwa Kim, Hyangsook Lee, Sanghyun Jo, Jinseong Heo
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Abstract
Provided are an electronic device including a dielectric layer having an adjusted crystal orientation and a method of manufacturing the electronic device. The electronic device includes a seed layer provided on a substrate and a dielectric layer provided on the seed layer. The seed layer includes crystal grains having aligned crystal orientations. The dielectric layer includes crystal grains having crystal orientations aligned in the same direction as the crystal orientations of the seed layer.
Claims25
An electronic device comprising:
- a substrate;
- a seed layer on the substrate, the seed layer including crystal grains having aligned crystal orientations;
- a dielectric layer on the seed layer, the dielectric layer including crystal grains having crystal orientations aligned in the same direction as the crystal orientations of the seed layer;
- and
- an electrode on the dielectric layer.
A method of manufacturing an electronic device, the method comprising:
- preparing a substrate having a channel layer therein;
- forming a seed layer on the channel layer, the seed layer comprising crystal grains having aligned crystal orientations;
- forming a dielectric layer on the seed layer, the dielectric layer comprising crystal grains having crystal orientations aligned in the same direction as the crystal orientations of the seed layer;
- and
- forming a gate electrode on the dielectric layer.
Dependencies are inferred from the claim text.